Method of detecting crystalline defects using sound waves
US6566886B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 28, 2001 |
| Grant date | May 20, 2003 |
| Priority date | — |
| Expiry date | Apr 25, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/2698
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Various methods of inspecting circuit structures are provided. In one aspect, a method of detecting structural defects in a circuit structure is provided. A natural frequency of the circuit structure is determined and the circuit structure is immersed in a liquid. A first plurality of sonic pulses is sent through the liquid. The first plurality of sonic pulses have a first frequency range selected to produce a plurality of collapsing bubbles proximate the circuit structure. The collapsing bubbles produce a second plurality of sonic pulses that have a second frequency range near or including the natural frequency of the circuit structure whereby the second plurality of sonic pulses causes the circuit structure to resonate. Thereafter, the circuit structure is inspected for structural damage. Early identification of crystalline defects is facilitated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.