Excimer or molecular fluorine laser having lengthened electrodes

US6570901B2 · kind B2 · utility

Assignee

• Lambda Physik AG · DE

Inventors

• Uwe Stamm · Göttingen, DE
• Juergen Kleinschmidt · Oettingen, DE
• Igor Bragin · Göttingen, DE

Key dates

• Filing date: Feb 22, 2001
• Grant date: May 27, 2003
• Expiry date: Aug 24, 2021

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S3/0971
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An excimer or molecular fluorine laser system includes a laser tube filled with a gas mixture including fluorine and a buffer gas, and multiple electrodes within the laser tube connected with a pulsed discharge circuit for energizing the gas mixture. At least one of the electrodes is longer than 28 inches in length, preferably two main electrodes are each extended to greater than 28 inches in length. The laser system further includes a resonator including the laser tube for generating a pulsed laser beam having a desired energy. The laser system is configured such that an output beam would be emitted having an energy below the desired energy if each of the electrodes were 28 inches in length or less, and the laser system outputs a beam at the desired energy due to the length of the electrodes being extended to a length greater than 28 inches.