Patent · US Expired

Micromechanical spring structure, in particular, for a rotation rate sensor

US6571629B1 · kind B1 · utility

20Cited by

1References

11Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Andreas Kipp · Reutlingen, DE
Joerg Hauer · Reutlingen, DE
Siegbert Geotz · Gerlingen, DE
Markus Lutz · Palo Alto, US

Key dates

Filing date	Nov 26, 2001
Grant date	Jun 3, 2003
Priority date	—
Expiry date	Nov 26, 2021

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2203/0109
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micromechanical spring structure, in particular for a rotation rate sensor, includes a first and a second cooperating elastic bar, segments of which run largely parallel to each other and segments of which are coupled with one another. The first and second elastic bars have a common curved area in which they are coupled with one another by a connecting area. A first transitional area to the connecting area, located between the first and second elastic bars, forms a largely smooth curve.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.