Method of determining movement sequence and apparatus for realizing it
US6576919B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 27, 1998 |
| Grant date | Jun 10, 2003 |
| Priority date | — |
| Expiry date | Feb 27, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70716
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to a movement sequence determining method of obtaining a preferred solution of movement sequence within a predetermined time and an apparatus for realizing it so that a movement sequence, indicating a visit order of plural process areas having degrees of freedom in scan directions of local areas being objects of a predetermined process of exposure, inspection, or the like, can be achieved in a shortest time. The method comprises at least an arithmetic step of generating a group including plural movement sequences that can be carried out, out of a group of movement sequence candidates, each indicating a visit order of plural process areas as well as scan directions of local areas in the plural process areas, and selecting a movement sequence in which a movement operation between plural process areas is completed in a shortest time, from the group generated, and a prestep of producing a movement time management table storing movement times, each from a movement start position to a movement end position, in unit lengths between process areas. Accordingly, a resultant solution of movement sequence includes information concerning the visit order of process …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.