Inspection device for wiring of an integrated circuit
US6577151B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 15, 2002 |
| Grant date | Jun 10, 2003 |
| Priority date | — |
| Expiry date | Nov 15, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/181
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection device for wiring of integrated circuit includes a base seat and an inspection cover, wherein the top end of the base seat is provided with cavity of appropriate depth and having supporting rib, and the two lateral sides of the cavity are provided with protruded edge a little higher than the cavity; the inspection cover having two side blocks is provided with an extended frame stripe such that the two side blocks and the two frame stripes are formed into a frame body, and corresponding stripes are formed between the two side blocks such that the corresponding stripes divides the frame body into a plurality of observation region, and each observation region is adapted for an inspection plate made from a transparent material, and the two side withholding seat of the inspection plate are located at the end face of the two side blocks, and the inspection plate moves along the end face of the two side blocks, whereby the base plate of the IC is positioned at the withholding protruded edge of the base seat and at the end face of the supporting stripe, then the inspection cap correspondingly covers the base seat and the inspection plate is used to inspect the height of arch …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.