Method for constructing a membrane probe using a depression
US6578264B1 · kind B1 · utility
85Cited by
61References
40Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 11, 2000 |
| Grant date | Jun 17, 2003 |
| Priority date | — |
| Expiry date | Apr 11, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49815
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for constructing a membrane probe that includes providing a substrate, and creating a depression within the substrate. Conductive material is located within the depression and a conductive trace is connected to the conductive material. A membrane is applied to support the conductive material and the substrate is removed from the conductive material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.