Support and alignment device for enabling chemical mechanical polishing rinse and film measurements

US6579149B2 · kind B2 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Richard J. Lebel · Williston, US
• Frederic Maurer · Valhalla, US
• Rock Nadeau · Jericho, US
• Paul Smith · Fort Collins, US
• Hemantha K. Wickramasinghe · Chappaqua, US
• Theodore G. van Kessel · Millbrook, US

Key dates

• Filing date: Feb 6, 2001
• Grant date: Jun 17, 2003
• Expiry date: Aug 3, 2021

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/681
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A device and method for providing precision alignment and support for an optical film measurement probe in the wafer rinse tank of a CMP polish tool. The device includes of a probe carrier, and spring loaded support guides attached to a support ring that supports and locates the mechanism in the rinse tank of the CMP tool. The probe carrier has multiple beveled bearing pads (three or more) that contact the rim of the rotating wafer chuck. Pressure from the chuck against these pads forces the probe carrier to maintain a fixed distance and orientation relative to the wafer while allowing the smooth rotation and motion of the wafer and chuck. Further, an integrated the wafer spray nozzles can be attached to the probe carrier that is located so as to minimize interference between wafer spraying and the probe carrier.