Mounting apparatus for an optical element

US6580570B2 · kind B2 · utility

Assignee

• Carl Zeiss Stiftung · DE

Inventors

• Jochen Becker · Oberkochen, DE
• Bernhard Gellrich · Aalen, DE
• Werner Lang · Calw, DE
• Alexander Kohl · Aalen, DE
• Sascha Kraus · Aalen, DE

Key dates

• Filing date: Oct 18, 2001
• Grant date: Jun 17, 2003
• Expiry date: Nov 29, 2021

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B7/026
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

In the case of a mounting apparatus, an optical element having an inner mount and an outer mount, in particular a lens in a projection lens system for semiconductor lithography, the inner mount is connected to the outer mount via three circumferentially distributed solid-state articulations. Manipulators, by means of which the inner mount can be displaced, act on the solid-state articulations. The solid-state articulations are T-shaped in cross section with a T-bar and a T-support. Attachment points between the inner mount and the outer mount are located in each case in the region of the outer ends of the T-bar. The manipulators act on the T-support in each case.