Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels
US6581623B1 · kind B1 · utility
39Cited by
23References
45Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 1, 2000 |
| Grant date | Jun 24, 2003 |
| Priority date | — |
| Expiry date | May 1, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/8803
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An auto-switching sub-atmospheric pressure gas delivery system, for dispensing gas to a gas-consuming process unit, e.g., a semiconductor manufacturing tool, without the occurrence of pressure spikes or flow perturbations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.