Methods for processing a workpiece using steam and ozone
US6582525B2 · kind B2 · utility
20Cited by
14References
41Claims
0Family size
Inventor
Key dates
| Filing date | Aug 14, 2001 |
| Grant date | Jun 24, 2003 |
| Priority date | — |
| Expiry date | Aug 14, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
In a method for processing a workpiece to remove material from a first surface of the workpiece, steam is introduced onto the first surface under conditions so that at least some of the steam condenses and forms a liquid boundary layer on the first surface. The condensing steam helps to maintain the first surface of the workpiece at an elevated temperature. Ozone is provided around the workpiece under conditions where the ozone diffuses through the boundary layer and reacts with the material on the first surface. The temperature of the first surface is controlled to maintain condensation of the steam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.