Optical system

US6583850B2 · kind B2 · utility

Assignee

• Carl Zeiss Stiftung · DE

Inventors

• Wolfgang Hummel · Dresden, DE
• Hubert Holderer · Oberkochen, DE
• Rudolf Von Bünau · Mountain View, US
• Christian Wagner · Rosenheim, DE
• Jochen Becker · Oberkochen, DE
• Stefan Xalter · Oberkochen, DE

Key dates

• Filing date: Jan 5, 2001
• Grant date: Jun 24, 2003
• Expiry date: Jan 5, 2021

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70883
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical element (1) of an optical system has at least one chamber (5) that is sealed against atmospheric pressure and is enclosed by boundary surfaces and that has a fluid filling. At least one of the boundary surfaces of the chamber (5) is exposed at least partially to illumination light. It is configured so that a change in the fluid pressure inside the chamber (5) results in a change in non-rotational-symmetric imaging properties of the optical element (1) having n-fold symmetry. For this purpose, a fluid source has a fluid connection to the chamber via a fluid supply line (17). Furthermore, a control device is provided for the pressure in the fluid filling.