Illumination apparatus
US6587182B1 · kind B1 · utility
13Cited by
4References
38Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 24, 2000 |
| Grant date | Jul 1, 2003 |
| Priority date | — |
| Expiry date | Mar 24, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70583
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A compact illumination apparatus reduces nonuniformity in the Gaussian intensity distribution of a laser beam and reduces interference noise due to an optical integrator. The illumination apparatus illuminates a mask with a predetermined pattern. A light source supplies a light beam. The light beam is split into multiple beams by multiple reflections between a totally reflective surface and a partially reflective surface. The totally reflective and partially reflective surfaces being inclined with respect to each other. The multiple beams are split to form multiple light source images.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.