Pressure transducer with compensation for thermal transients
US6588280B1 · kind B1 · utility
14Cited by
5References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 22, 2002 |
| Grant date | Jul 8, 2003 |
| Priority date | — |
| Expiry date | Apr 22, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/125
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method is disclosed for providing transient temperature compensation in a pressure transducer. The transducer includes a capacitive pressure sensor, the pressure sensor including a diaphragm, at least part of the diaphragm moving in response to changes in a pressure. The transducer may further include an electronic circuit which generates an uncompensated output signal representative of the pressure. The disclosed method generates a compensated output signal according to a function of the uncompensated output signal and a difference between a temperature of the pressure sensor and a temperature of the ambient environment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.