Device and method for reducing vacuum pump energy consumption
US6589023B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 9, 2001 |
| Grant date | Jul 8, 2003 |
| Priority date | — |
| Expiry date | Oct 9, 2021 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04C25/02
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
Generally, a vacuum pumping system having efficient power usage is provided. In one embodiment, the vacuum pumping system includes a first pump, a check valve and a second pump. The check valve and second pump are coupled in parallel to an exhaust line of the first pump. The first pump and second pump have a ratio of internal volume that is about 20 to about 130. In another embodiment, the vacuum pumping system includes a first pump, a check valve and a second pump. The check valve and second pump are coupled in parallel to an exhaust line of the first pump. The first pump and second pump have a ratio of power consumption that is about 5 to about 20. In yet another embodiment, the first pump and second pump have a ratio of pumping capacity that is about 50 to about 200.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.