Biased rotatable combdrive devices and methods
US6593677B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 14, 2001 |
| Grant date | Jul 15, 2003 |
| Priority date | — |
| Expiry date | Jun 19, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/359
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Rotating devices including actuators and position sensors that employ combdrives are described. One design of a combdrive fabricated from a single layer is provided such that, in a nominal state, the two sets of comb fingers are substantially interdigitated according to a predetermined engagement. A rotating element may be attached to a rotatable flexure disposed along an axis and coupled to the comb fingers along with a biasing element attached to the rotating element to cause the comb fingers along with the rotating element to undergo a controlled angular displacement from the initial engagement and in response to feedback from sensing the position of the movable or rotating element. A voltage may be applied between comb fingers to cause the rotating element to undergo further rotation about the axis in a predetermined manner. Alternatively, a time-vary biasing force may be exerted on the rotating element, causing the first comb fingers along with the rotating element to undergo further rotation about the axis in a predetermined manner. The combdriven device can serve as both rotating actuators and position sensor. By arranging two such combdrives in a gimbaled structure bi-axial…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.