Patent assignee · US · COMPANY

Onix Microsystems

15Patents
0Active
15Granted
30Portfolio score

Filing activity: Feb 28, 2000 → Jan 29, 2002

Most-cited patents

PatentTitleAreaCited byStatus
US6330102A Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays and relay optics Physics 77 Expired
US6593677B2 Biased rotatable combdrive devices and methods Physics 68 Expired
US6528887B2 Conductive equipotential landing pads formed on the underside of a MEMS device Physics 39 Expired
US6612029B2 Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods Emerging Cross-Sectional Technologies 39 Expired
US6674383B2 PWM-based measurement interface for a micro-machined electrostatic actuator Electricity 28 Expired
US6629461B2 Biased rotatable combdrive actuator methods Physics 20 Expired
US6764936B2 Mechanical landing pad formed on the underside of a MEMS device Physics 14 Expired
US6583031B2 Method of making a MEMS element having perpendicular portion formed from substrate Physics 12 Expired
US6473544B1 Optical switch having equalized beam spreading in all connections Physics 12 Expired
US6514781B2 Maintaining the state of a MEMS device in the event of a power failure Physics 8 Expired
US6437902B2 Optical beam steering switching system Physics 8 Expired
US6480319B2 Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays Physics 6 Expired
US6375365B1 Apparatus and packaging method to assemble optical modules to a common substrate with adjustable plugs Emerging Cross-Sectional Technologies 6 Expired
US6586841B1 Mechanical landing pad formed on the underside of a MEMS device Physics 4 Expired
US6853779B2 Floating optical carrier Emerging Cross-Sectional Technologies 0 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.