Antistatic optical pellicle
US6594073B2 · kind B2 · utility
10Cited by
5References
33Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 30, 2001 |
| Grant date | Jul 15, 2003 |
| Priority date | — |
| Expiry date | May 30, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/62
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An antistatic pellicle for use with deep-ultraviolet light. The pellicle is coated with a thin metal oxide layer that has high transmissivity for deep-ultraviolet light and an electrical resistivity low enough to minimize electrostatic discharge. The metal oxide layer may be produced by a sol-gel process using a reactive polyvalent metal sol-precursor. The sol-precursor is converted to a sol, the sol is applied to a membrane so that it produces a gel on a surface of the membrane, and then the gel is dried to a coating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.