Electronic device manufacture
US6596467B2 · kind B2 · utility
69Cited by
7References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 8, 2001 |
| Grant date | Jul 22, 2003 |
| Priority date | — |
| Expiry date | Dec 24, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24331
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Disclosed are methods of manufacturing electronic devices, particularly integrated circuits. Such methods include the use of low dielectric constant material prepared by using a removable porogen material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.