Height scanning interferometer for determining the absolute position and surface profile of an object with respect to a datum
US6597460B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 25, 2001 |
| Grant date | Jul 22, 2003 |
| Priority date | — |
| Expiry date | Nov 29, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B9/0209
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention features a surface profiling method including: collecting interferometric data related to a surface profile of a measurement object; and calculating the surface profile based on the collected interferometric data and at least one value indicative of dispersion in the phase change on reflection (PCOR) of the profiled surface of the measurement object. The invention also features a surface profiling system including: an interferometry system which during operation provides interferometric data related to a surface profile of a measurement object; and an electronic processor coupled the interferometry system, wherein during operation the electronic processor calculates the surface profile based on the interferometric data and at least one parameter indicative of dispersion in the phase change on reflection (PCOR) of the profiled surface of the measurement object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.