Pattern data inspection method and storage medium
US6598185B1 · kind B1 · utility
1Cited by
7References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2000 |
| Grant date | Jul 22, 2003 |
| Priority date | — |
| Expiry date | Feb 28, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70508
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A pattern data inspection method includes the steps of (a) carrying out a logical/sizing process with respect to original pattern data, (b) carrying out a reverse-logical/reverse-sizing process with respect to pattern data subjected to the logical/sizing process, and (c) carrying out a logical process with respect to the original pattern data and pattern data subjected to the reverse-logical/reverse-sizing process, and inspecting the pattern data subjected to the logical/sizing process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.