Katsuji Tabara
5Patents
4h-index
12Co-inventors
50Inventor score
Filing activity: Dec 10, 1992 → Jun 10, 2005
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7514355B2 | Multilayer interconnection structure and method for forming the same | Electricity | 43 | Expired |
| US5287290A | Method and apparatus for checking a mask pattern | Physics | 18 | Expired |
| US5781656A | Method and apparatus for inspecting patterns composed of reticle data | Physics | 8 | Expired |
| US7242095B2 | Semiconductor device having a dummy pattern | Electricity | 5 | Expired |
| US6598185B1 | Pattern data inspection method and storage medium | Physics | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.