Patent · US Expired

Surface micromachined optical system with reinforced mirror microstructure

US6600587B2 · kind B2 · utility

17Cited by
32References
29Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 23, 2001
Grant dateJul 29, 2003
Priority date—
Expiry dateApr 23, 2021

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB81B2203/058
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.