Patent assignee · US · COMPANY

MEMX, Inc.

39Patents
0Active
39Granted
37Portfolio score

Filing activity: Apr 23, 2001 → Nov 12, 2004

Most-cited patents

PatentTitleAreaCited byStatus
US6778306B2 Surface micromachined optical system with reinforced mirror microstructure Performing Operations; Transporting 71 Expired
US6756317B2 Method for making a microstructure by surface micromachining Performing Operations; Transporting 65 Expired
US6640023B2 Single chip optical cross connect Electricity 51 Expired
US6707176B1 Non-linear actuator suspension for microelectromechanical systems Performing Operations; Transporting 51 Expired
US6864618B2 Method for operating a microelectromechanical system using a stiff coupling Electricity 48 Expired
US6703675B1 Particle filter for partially enclosed microelectromechanical systems Performing Operations; Transporting 20 Expired
US6993818B2 Multi-fixture assembly of cutting tools Emerging Cross-Sectional Technologies 20 Expired
US6600587B2 Surface micromachined optical system with reinforced mirror microstructure Performing Operations; Transporting 17 Expired
US6844657B2 Microelectromechanical system and method for producing displacement multiplication Electricity 12 Expired
US6954348B1 Tunable MEMS capacitor Electricity 11 Expired
US6650806B2 Compliant push/pull connector microstructure Physics 11 Expired
US6747340B2 Multi-level shielded multi-conductor interconnect bus for MEMS Electricity 9 Expired
US6731513B2 Shielded multi-conductor interconnect bus for MEMS Electricity 7 Expired
US6665104B2 Mirror positioning assembly with vertical force component compensation Physics 5 Expired
US6875257B2 Particle filter for microelectromechanical systems Emerging Cross-Sectional Technologies 5 Expired
US6637901B2 Mirror assembly with elevator lifter Performing Operations; Transporting 4 Expired
US6791730B2 Surface micromachined optical system with reinforced mirror microstructure Performing Operations; Transporting 4 Expired
US6707077B2 Chip interconnect bus Electricity 3 Expired
US6894420B2 Non-linear actuator suspension for microelectromechanical systems Electricity 3 Expired
US6847152B2 Microelectromechnical system for tilting a platform Performing Operations; Transporting 3 Expired
US6944365B2 Off axis optical signal redirection architectures Physics 2 Expired
US6831391B2 Microelectromechanical system for tilting a platform Performing Operations; Transporting 2 Expired
US6824278B2 Self-shadowing MEM structures Physics 2 Expired
US6989582B2 Method for making a multi-die chip Performing Operations; Transporting 2 Expired
US6706619B2 Method for tiling unit cells Performing Operations; Transporting 2 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.