MEMX, Inc.
39Patents
0Active
39Granted
37Portfolio score
Filing activity: Apr 23, 2001 → Nov 12, 2004
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6778306B2 | Surface micromachined optical system with reinforced mirror microstructure | Performing Operations; Transporting | 71 | Expired |
| US6756317B2 | Method for making a microstructure by surface micromachining | Performing Operations; Transporting | 65 | Expired |
| US6640023B2 | Single chip optical cross connect | Electricity | 51 | Expired |
| US6707176B1 | Non-linear actuator suspension for microelectromechanical systems | Performing Operations; Transporting | 51 | Expired |
| US6864618B2 | Method for operating a microelectromechanical system using a stiff coupling | Electricity | 48 | Expired |
| US6703675B1 | Particle filter for partially enclosed microelectromechanical systems | Performing Operations; Transporting | 20 | Expired |
| US6993818B2 | Multi-fixture assembly of cutting tools | Emerging Cross-Sectional Technologies | 20 | Expired |
| US6600587B2 | Surface micromachined optical system with reinforced mirror microstructure | Performing Operations; Transporting | 17 | Expired |
| US6844657B2 | Microelectromechanical system and method for producing displacement multiplication | Electricity | 12 | Expired |
| US6954348B1 | Tunable MEMS capacitor | Electricity | 11 | Expired |
| US6650806B2 | Compliant push/pull connector microstructure | Physics | 11 | Expired |
| US6747340B2 | Multi-level shielded multi-conductor interconnect bus for MEMS | Electricity | 9 | Expired |
| US6731513B2 | Shielded multi-conductor interconnect bus for MEMS | Electricity | 7 | Expired |
| US6665104B2 | Mirror positioning assembly with vertical force component compensation | Physics | 5 | Expired |
| US6875257B2 | Particle filter for microelectromechanical systems | Emerging Cross-Sectional Technologies | 5 | Expired |
| US6637901B2 | Mirror assembly with elevator lifter | Performing Operations; Transporting | 4 | Expired |
| US6791730B2 | Surface micromachined optical system with reinforced mirror microstructure | Performing Operations; Transporting | 4 | Expired |
| US6707077B2 | Chip interconnect bus | Electricity | 3 | Expired |
| US6894420B2 | Non-linear actuator suspension for microelectromechanical systems | Electricity | 3 | Expired |
| US6847152B2 | Microelectromechnical system for tilting a platform | Performing Operations; Transporting | 3 | Expired |
| US6944365B2 | Off axis optical signal redirection architectures | Physics | 2 | Expired |
| US6831391B2 | Microelectromechanical system for tilting a platform | Performing Operations; Transporting | 2 | Expired |
| US6824278B2 | Self-shadowing MEM structures | Physics | 2 | Expired |
| US6989582B2 | Method for making a multi-die chip | Performing Operations; Transporting | 2 | Expired |
| US6706619B2 | Method for tiling unit cells | Performing Operations; Transporting | 2 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.