Catadioptric objective comprising two intermediate images

US6600608B1 · kind B1 · utility

Assignee

• Carl Zeiss Stiftung · DE

Inventors

• David Shafer · Fairfield, US
• Alois Herkommer · Aalen, DE
• Karl-Heinz Schuster · Oberkochen, DE
• Gerd Furter · Ellwangen, DE
• Rudolf Von Bünau · Mountain View, US
• Wilhelm Ulrich · Aalen, DE

Key dates

• Filing date: Nov 5, 1999
• Grant date: Jul 29, 2003
• Expiry date: Nov 5, 2019

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70275
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An objective comprising axial symmetry, at least one curved mirror and at least one lens and two intermediate images. The objective includes two refractive partial objectives and one catadioptric partial objective. The objective includes a first partial objective, a first intermediate a image, a second partial objective, a second intermediate image, and a third partial objective. At least one of the partial objectives is purely refractive. One of the partial objectives is purely refractive and one is purely catoptric.