Patent · US Expired

Closed-grid bus architecture for wafer interconnect structure

US6603323B1 · kind B1 · utility

94Cited by
21References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 10, 2000
Grant dateAug 5, 2003
Priority date
Expiry dateNov 2, 2020

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/49117
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An interconnect structure employs a closed-grid bus to link an integrated circuit tester channel to an array of input/output (I/O) pads on a semiconductor wafer so that the tester channel can concurrently communicate with all of the I/O pads. The interconnect structure includes a circuit board implementing an array of bus nodes, each corresponding to a separate one of the I/O pads. The circuit board includes at least two layers. Traces mounted on a first layer form a set of first daisy-chain buses, each linking all bus nodes of a separate row of the bus node array. Traces mounted on a second circuit board layer form a set of second daisy-chain buses, each linking all bus nodes of a separate column of the bus node array. Vias and other circuit board interconnect ends of the first and second daisy-chain buses so that they form the closed-grid bus. Each bus node is connected though a separate isolation resistor to a separate contact pad mounted on a surface of the circuit board. A set of spring contacts or probes link each contact pad to a separate one of the I/O pads on the wafer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.