Silicon-on-insulator optical waveguide Michelson interferometer sensor for temperature monitoring
US6603559B2 · kind B2 · utility
11Cited by
2References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 11, 2001 |
| Grant date | Aug 5, 2003 |
| Priority date | — |
| Expiry date | Nov 17, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K11/3206
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A high accurate SOI optical waveguide Michelson interferometer sensor for temperature monitoring combines a waveguide coupler, waveguide, or splitter with two silicon-on-insulator Bragg gratings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.