Microscopic geometry measuring device
US6604295B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 13, 2001 |
| Grant date | Aug 12, 2003 |
| Priority date | — |
| Expiry date | Mar 13, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q20/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A fine feed mechanism (50) and a coarse feed mechanism (60) respectively for minutely and greatly displacing a stylus (12) is provided to a microscopic geometry measuring device (1), so that the respective mechanisms (50, 60) are combinedly actuated for easily controlling the movement of the stylus (12) in a wide range at a short time. Further, a movable balancing portion (53) moving in a direction opposite to a movable driving portion (52) is provided to the fine feed mechanism (50). Since a reaction force caused by the movement of the movable driving portion (52) is cancelled by another reaction force caused by the movement of the movable balancing portion (53) at a fixed portion (51), no mechanical interference is caused between the respective mechanisms (50, 60), thus accurately controlling the movement of the stylus (12).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.