System for detecting anomalies and/or features of a surface
US6608676B1 · kind B1 · utility
110Cited by
16References
62Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 1, 1997 |
| Grant date | Aug 19, 2003 |
| Priority date | — |
| Expiry date | Aug 1, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A cylindrical mirror or lens is used to focus an input collimated beam of light onto a line on the surface to be inspected, where the line is substantially in the plane of incidence of the focused beam. An image of the beam is projected onto an array of charge-coupled devices parallel to the line for detecting anomalies and/or features of the surface, where the array is outside the plane of incidence of the focused beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.