Inventor · Danville, CA, US

Stanley Stokowski

41Patents
15h-index
42Co-inventors
81Inventor score

Filing activity: Dec 10, 1976 → Oct 29, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US6201601A Sample inspection system Physics 232 Expired
US5883710A Scanning system for inspecting anomalies on surfaces Physics 118 Expired
US5076692A Particle detection on a patterned or bare wafer surface Physics 113 Expired
US6608676B1 System for detecting anomalies and/or features of a surface Physics 110 Expired
US6215551A Scanning system for inspecting anomalies on surfaces Physics 92 Expired
US6639662B2 Sample inspection system Physics 46 Expired
US5241366A Thin film thickness monitor Physics 43 Expired
US6384910B2 Sample inspection system Physics 32 Expired
US4824598A Synthetic laser medium Chemistry; Metallurgy 31 Expired
US7088443B2 System for detecting anomalies and/or features of a surface Physics 24 Expired
US8711346B2 Inspection systems and methods for detecting defects on extreme ultraviolet mask blanks Physics 20 Active
US4060729A Pyroelectric detector with decreased susceptibility to vibrational noise Electricity 19 Expired
US6956644B2 Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination Electricity 18 Expired
US6674522B2 Efficient phase defect detection system and method Physics 16 Expired
US6636302B2 Scanning system for inspecting anamolies on surfaces Physics 15 Expired
US6657715B2 Sample inspection system Physics 15 Expired
US6618134B2 Sample inspection system Physics 15 Expired
US7297453B2 Systems and methods for mitigating variances on a patterned wafer using a prediction model Emerging Cross-Sectional Technologies 14 Expired
US7303842B2 Systems and methods for modifying a reticle's optical properties Emerging Cross-Sectional Technologies 14 Expired
US7564545B2 Inspection methods and systems for lithographic masks Physics 14 Active
US4661284A Silica and boron-containing ultraphosphate laser glass with low concentration quenching and improved thermal shock resistance Emerging Cross-Sectional Technologies 13 Expired
US4998019A Photoemission contaminant detector Physics 12 Expired
US7119897B2 Sample inspection system Physics 11 Expired
US5140609A TRD temperature sensor Emerging Cross-Sectional Technologies 10 Expired
US8785082B2 Method and apparatus for inspecting a reflective lithographic mask blank and improving mask quality Physics 10 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.