System and method for controlling movement of a workpiece in a thermal processing system
US6610968B1 · kind B1 · utility
24Cited by
18References
44Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 27, 2000 |
| Grant date | Aug 26, 2003 |
| Priority date | — |
| Expiry date | Apr 5, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67109
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A system and method for processing a workpiece in a thermal processing furnace by measuring the temperature of the workpiece in the thermal processing furnace, and based upon an intended temperature profile and the measured temperature of the workpiece, moving the workpiece through the furnace to heat process the workpiece generally according to the intended temperature profile.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.