Adjustment of the partial coherence of the light energy in an imaging system
US6611387B1 · kind B1 · utility
4Cited by
4References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 29, 2000 |
| Grant date | Aug 26, 2003 |
| Priority date | — |
| Expiry date | Oct 2, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70166
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention describes an apparatus comprising an optical array generating a distribution of partial coherence of light energy and an aperture to select a subset of said distribution of partial coherence.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.