Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods
US6612029B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 14, 2001 |
| Grant date | Sep 2, 2003 |
| Priority date | — |
| Expiry date | Mar 14, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49156
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of fabricating multi-layer vertical comb-drive actuator that includes a first comb structure having a plurality of first comb fingers and a second comb structure having a plurality of second comb fingers, wherein the first and second comb fingers are substantially interdigitated. The present invention includes masking and etching of a structure that contains these multiple layers, wherein the first and second comb fingers are simultaneously fabricated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.