Molecular pump
US6612816B1 · kind B1 · utility
Inventors
Key dates
| Filing date | Nov 15, 2001 |
| Grant date | Sep 2, 2003 |
| Priority date | — |
| Expiry date | Nov 15, 2021 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D19/04
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The invention concerns a molecular pump for evacuating a gas from a chamber, comprising a substantially sealed box (1) having on one of its sides an intake orifice (2) to be connected to said chamber and, on the opposite side, an outlet orifice (3), to be preferably connected to a discharge pump, whereby elements (4) are mounted between those two orifices (2) and (3) at some distance from one another in substantially fixed sites inside said box (1) for the gas to pass through, said elements (4) being of such a nature as to impart to said gas molecules, coming from said chamber and coming into contact with said elements (4), a speed whereof the resultant is oriented towards the outlet orifice (3).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.