Platen with lateral web tensioner
US6612914B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 14, 2000 |
| Grant date | Sep 2, 2003 |
| Priority date | — |
| Expiry date | Jan 4, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B21/20
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
Generally, a method and apparatus for retaining a web of polishing material is provided. In one embodiment, an apparatus for retaining a web of polishing material includes a platen that has a first clamp and a second clamp disposed on opposite sides of the platen. A top surface of the platen is adapted to support the web of polishing material in an orientation having the web's edges disposed approximate the first and second sides of the platen. The first and second clamps are actuated to laterally tension the web therebetween.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.