Member used for charged beam processing apparatus, and mask
US6613482B1 · kind B1 · utility
2Cited by
4References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 13, 2000 |
| Grant date | Sep 2, 2003 |
| Priority date | — |
| Expiry date | Sep 13, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/143
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A member adopted to be irradiated with a charged beam in an oxidizing atmosphere in a charged beam processing apparatus; comprising: a region which is to be irradiated with the charged beam, which is covered by a conductive and not oxidizable material or a material that becomes a conductive oxide when said material is oxidized.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.