Method for improving substrate alignment
US6613589B2 · kind B2 · utility
3Cited by
3References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 6, 2001 |
| Grant date | Sep 2, 2003 |
| Priority date | — |
| Expiry date | May 9, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/7046
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for improving substrate alignment on a stepper comprises imposing predetermined corrections on each of a plurality of substrates, a different set of corrections for each substrate. The actual corrections occurring on the substrates are measured and mathematically processed to produce a matrix and a plurality of equations. The equations are resolved to provide correct corrections for accurate alignment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.