Wafer support fixture composed of silicon
US6617540B2 · kind B2 · utility
13Cited by
32References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 23, 2001 |
| Grant date | Sep 9, 2003 |
| Priority date | — |
| Expiry date | Mar 5, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67303
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A silicon wafer process fixture having various silicon members secured together. The fixture may include a plurality of generally elongate silicon support member secured to a generally planar silicon base. The silicon members may be made of monocrystalline silicon, polycrystalline silicon, or virgin polysilicon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.