Patent assignee · US · COMPANY

Integrated Materials, Inc.

25Patents
7Active
25Granted
34Portfolio score

Filing activity: Apr 15, 1999 → Dec 18, 2007 · 7 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US7736437B2 Baffled liner cover Electricity 448 Active
US6450346B1 Silicon fixtures for supporting wafers during thermal processing Electricity 22 Expired
US6455395B1 Method of fabricating silicon structures including fixtures for supporting wafers Electricity 18 Expired
US6617540B2 Wafer support fixture composed of silicon Electricity 13 Expired
US6284997A Crack free welding of silicon Performing Operations; Transporting 12 Expired
US6225594A Method and apparatus for securing components of wafer processing fixtures Electricity 12 Expired
US6205993A Method and apparatus for fabricating elongate crystalline members Emerging Cross-Sectional Technologies 8 Expired
US6979659B2 Silicon fixture supporting silicon wafers during high temperature processing Electricity 8 Expired
US6617225B2 Method of machining silicon Electricity 6 Expired
US7736436B2 Detachable edge ring for thermal processing support towers Emerging Cross-Sectional Technologies 5 Active
US7666513B2 Adhesive of a silicon and silica composite for bonding together silicon parts Emerging Cross-Sectional Technologies 5 Active
US6357432B2 Silicon support members for wafer processing fixtures Electricity 4 Expired
US6727191B2 High temperature hydrogen anneal of silicon wafers supported on a silicon fixture Electricity 4 Expired
US6196211A Support members for wafer processing fixtures Electricity 4 Expired
US7108746B2 Silicon fixture with roughened surface supporting wafers in chemical vapor deposition Chemistry; Metallurgy 3 Expired
US7083694B2 Adhesive of a silicon and silica composite particularly useful for joining silicon parts Emerging Cross-Sectional Technologies 3 Expired
US7137546B2 Silicon tube formed of bonded staves Emerging Cross-Sectional Technologies 2 Expired
US6583377B2 Welded silicon member Performing Operations; Transporting 2 Expired
US7074693B2 Plasma spraying for joining silicon parts Emerging Cross-Sectional Technologies 1 Expired
US6403914B1 Method for welding silicon workpieces Performing Operations; Transporting 1 Expired
US7713355B2 Silicon shelf towers Electricity 1 Active
US7854974B2 Tube formed of bonded silicon staves Emerging Cross-Sectional Technologies 1 Active
US7611989B2 Polysilicon dummy wafers and process used therewith Emerging Cross-Sectional Technologies 1 Active
US7736747B2 Silicon parts joined by a silicon layer preferably plasma sprayed Emerging Cross-Sectional Technologies 0 Active
US6838636B2 Two heat sources for welding silicon Performing Operations; Transporting 0 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.