Patent · US Expired

Thermal performance in flip chip/integral heat spreader packages using low modulus thermal interface material

US6617683B2 · kind B2 · utility

62Cited by
7References
26Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 28, 2001
Grant dateSep 9, 2003
Priority date
Expiry dateSep 28, 2021

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/3511
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A microprocessor package and a method of dissipating heat therefrom have improved thermal performance by utilizing low modulus thermal interface material between the flip chip, central processing unit and a heat spreader in the package. A modulus of elasticity of the thermal interface material in the kPa range is preferably provided by a cured, filled polymer gel which is lightly crosslinked. The gel thermal interface material enables the package to have a post end-of-line and post reliability testing thermal resistance across the thermal interface material between the flip chip and the heat spreader of <0.45 cm2&deg; C./Watt. Mitigation of thin film cracking in die and prevention of interfacial delamination upon temperature cycling are also attained.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.