Laser beam inspection apparatus
US6618135B2 · kind B2 · utility
0Cited by
9References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 1, 2000 |
| Grant date | Sep 9, 2003 |
| Priority date | — |
| Expiry date | Jan 30, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/95684
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A laser beams inspection apparatus suitable for inspecting electronic components such as ICs mounted on a substrate. The inspection apparatus includes a scan mechanism. The scan mechanism works to move a laser beam emitted from a laser emitter to scan a target one of electronic components in a given scan range. The scan mechanism is designed to change orientation of emission of the laser beam to change the scan range as a function of the type (e.g., the size) of the target electronic component, thereby minimizing inspection errors regardless of the type of the electronic components to be inspected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.