Defective pixel compensation method
US6618185B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 28, 2001 |
| Grant date | Sep 9, 2003 |
| Priority date | — |
| Expiry date | Nov 28, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70291
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to a method for compensating the impact of at least one defective pixel with a known position in a spatial light modulator (SLM) when creating a pattern of the SLM on a work piece covered with a layer sensitive to electromagnetic radiation. A source for emitting electromagnetic radiation is provided. Said radiation is illuminating said SLM having a plurality of modulating elements (pixels). In a writing pass an image of said modulator is projected on said work piece. A compensation for defective pixels in at least one other writing pass is performed. The invention also relates to an apparatus for performing said method.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.