Preionization arrangement for a gas laser

US6618422B2 · kind B2 · utility

Assignee

• Lambda Physik AG · DE

Inventors

• Igor Bragin · Göttingen, DE
• Ulrich Rebhan · Göttingen, DE
• Uwe Stamm · Göttingen, DE
• Dirk Basting · Fort Lauderdale, US

Key dates

• Filing date: May 22, 2001
• Grant date: Sep 9, 2003
• Expiry date: May 22, 2021

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S3/0384
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A preionization device for a gas laser comprises an internal preionization electrode having a dielectric housing around it and an external preionization electrode displaced from the dielectric housing by a small gap. The dielectric housing includes two cylindrical regions of differing outer radii of curvature. An open end of the housing has a larger radius of curvature than the other end which is closed. The internal electrode connects to circuitry external to the discharge chamber via a conductive feedthrough which penetrates through the housing. The external circuitry prevents voltage oscillations caused by residual energy stored as capacitance in the dielectric housing. The external preionization electrode, which is connected electrically to one of the main discharge electrodes, is formed to shield the internal preionization electrode from the other main discharge electrode to prevent arcing therebetween. The external electrode is also formed to shield the outer gas volume and walls of the discharge chamber from the preionization unit. A semi-transparent external electrode prevents charged particles emanating from the main discharge area from settling on the housing and causing …