Optical encoder and method of fabricating its sensor head
US6621068B2 · kind B2 · utility
4Cited by
7References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 27, 2001 |
| Grant date | Sep 16, 2003 |
| Priority date | — |
| Expiry date | Jun 27, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/36
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical encoder is constructed by a reflection-type scale 1 and a sensor head 4. The sensor head 4 has an irradiation light source 2 and a sensor board 3, the sensor board 3 has a transparent substrate 30 on which light-receiving areas 5 for outputting displacement signals which have different phase with each other, and index gratings 6 for modulating the scale irradiating light are formed to be alternately arranged. The index gratings 6 are formed of the same material film as metal electrode of the light-receiving areas 5.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.