Patent · US Expired

Integrated optoelectronic thin-film sensor and method of producing same

US6621104B1 · kind B1 · utility

3Cited by

16References

29Claims

0Family size

Assignee

DR. JOHANNES HEIDENHAIN GMBH · DE

Inventors

Peter Speckbacher · Kirchweidach, DE
Dieter Michel · Traunstein, DE

Key dates

Filing date	Feb 15, 2002
Grant date	Sep 16, 2003
Priority date	—
Expiry date	Feb 15, 2022

Classification

Technology area (CPC H)Electricity
CPC primaryH10F39/103
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A measuring system that includes a scale and a transparent substrate located opposite the scale. The transparent includes a graduation structure and a semiconductor layer arranged on a first side of the transparent substrate facing away from the scale, wherein a photodetector, a light source and an electronic circuit are integrated into the semiconductor layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.