Micro electromechanical switch having self-aligned spacers
US6621392B1 · kind B1 · utility
136Cited by
8References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 25, 2002 |
| Grant date | Sep 16, 2003 |
| Priority date | — |
| Expiry date | Apr 25, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2059/0072
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of fabricating and the structure of a micro-electromechanical switch (MEMS) device provided with self-aligned spacers or bumps is described. The spacers are designed to have an optimum size and to be positioned such that they act as a detent mechanism for the switch to minimize problems caused by stiction. The spacers are fabricated using standard semiconductor techniques typically used for the manufacture of CMOS devices. The present method of fabricating these spacers requires no added depositions, no extra lithography steps, and no additional etching.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.