Quality surveillance of a production process

US6622101B1 · kind B1 · utility

Assignees

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE
• X-FAB SEMICONDUCTOR FOUNDRIES GMBH · DE

Inventors

• Richard Oechsner · Nuremberg, DE
• Thomas Tschaftary · Ergolding, DE
• Poitr Strzyzewski · Herzogenrath, DE
• Lothar Pfitzner · Erlangen, DE
• Claus Schneider · Burgsinn, DE
• Peter Hennig · Vieselbach, DE

Key dates

• Filing date: Jan 22, 2002
• Grant date: Sep 16, 2003
• Expiry date: Jan 22, 2022

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P90/02
• WIPO field: Control
• WIPO sector: Instruments

Abstract

Method for monitoring a quality of a plurality of particularly different technical product types which are produced in a quasi-parallel manufacturing process, the manufacturing method including several sequentially arranged manufacturing stations, and whereby a course of a state variable for at least one of the manufacturing stations is determined point-by-point and displayed, the method including determining as a first type number a number of product types to be monitored, determining technical product parameter which is affected in the at least one manufacturing station, allocating a measuring arrangement to the manufacturing station for measuring the technical product parameter for at least one of the monitored product types, taking a random sample of a product type whose physical state is modified in the manufacturing station, the random sample being taken the first type number of product types, determining measured values for the determined technical product parameter of the random sample, calculating an individual average value from the measured values, storing the individual average value in a multi-dimensional average value attributed to the first type number, and repeating…