Lothar Pfitzner
10Patents
5h-index
24Co-inventors
66Inventor score
Filing activity: Oct 23, 1997 → Feb 2, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7133140B2 | Apparatus and measurement procedure for the fast, quantitative, non-contact topographic investigation of semiconductor wafers and other mirror like surfaces | Physics | 87 | Expired |
| US6928892B2 | Configuration for determining a concentration of contaminating particles in a loading and unloading chamber of an appliance for processing at least one disk-like object | Physics | 18 | Expired |
| US6622101B1 | Quality surveillance of a production process | Emerging Cross-Sectional Technologies | 13 | Expired |
| US7003149B2 | Method and device for optically monitoring fabrication processes of finely structured surfaces in a semiconductor production | Electricity | 7 | Expired |
| US6724475B2 | Apparatus for rapidly measuring angle-dependent diffraction effects on finely patterned surfaces | Physics | 5 | Expired |
| US7000454B2 | Particle measurement configuration and semiconductor wafer processing device with such a configuration | Physics | 4 | Expired |
| US6089548A | Process and device for converting a liquid stream flow into a gas stream flow | Emerging Cross-Sectional Technologies | 3 | Expired |
| US6784445B2 | Apparatus for monitoring intentional or unavoidable layer depositions and method | Electricity | 1 | Expired |
| US11988352B2 | Light module, motor vehicle light assembly, and production method | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US12000554B2 | Lighting apparatus for a motor vehicle and assembly of the components of the lighting apparatus | Mechanical Engineering; Lighting; Heating | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.