Split magnetic lens for controlling a charged particle beam
US6624426B2 · kind B2 · utility
0Cited by
7References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 11, 2000 |
| Grant date | Sep 23, 2003 |
| Priority date | — |
| Expiry date | Jun 10, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/1501
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A magnetic lens focuses a charged particle beam generated by an instrument to a very small spot for deriving characteristics of a sample. The magnetic flux pattern is created by splitting the winding coil into a primary coil and a secondary coil. This enables faster adjustment of the magnetic flux, and with improved resolution.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.