Apparatus and method to read output information from a backside of a silicon device
US6624643B2 · kind B2 · utility
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14References
29Claims
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Assignee
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Key dates
| Filing date | Dec 8, 2000 |
| Grant date | Sep 23, 2003 |
| Priority date | — |
| Expiry date | Apr 4, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2656
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Photon emissions from a backside of a silicon device or integrated circuit are detected. The photon emissions can be used for a technique to read output information from the silicon device, as the photon emissions from part of an output signal path for the silicon device. The emitted photons pass through openings of a mask positioned over the backside of the silicon device, and are detected by a photodetector array. Electrical signals are generated from the detected photons, and can be converted to optical signals for subsequent transmission from optical transmitters coupled to the photodetector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.