Laser writer

US6624878B1 · kind B1 · utility

Assignee

• Micronic Laser Systems AB · SE

Inventors

• Torbjorn Sandstrom · Mölnlycke, SE
• Leif Odselius · Upplands Väsby, SE
• Anders Thuren · Täby, SE
• Stefan Gullstrand · Danderyd, SE

Key dates

• Filing date: Nov 2, 2001
• Grant date: Sep 23, 2003
• Expiry date: Nov 2, 2021

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70383
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A system and method are provided for microlithographic writing on photosensitive substrates, and especially high precision printing of patterns, such as photomasks, for semiconductor device patterns, display panels, integrated optical devices and electronic interconnect structures. The method includes the steps of detecting significant temporary writing error conditions and interrupting the writing process as a response to a detection of such an error condition. Thereafter a support table is reversed to the position it had when the writing was interrupted, and the writing process is restarted at the same position where the writing was interrupted when the error condition ceases to exist.